xPro4C DLC – Coating System


Diamond-like-coatings by
HiPIMS and DC-pulsed
magnetron sputtering technology
 

The xPro4C is the advanced industrial small size DLC (diamond-like-carbon)coating system, which includes the HiPIMS**-technology. Meanwhile, PECVDprocesscanalso beadopted. It is specifically designed for the deposition of high performance DLC coatings, such as a-C, a-C: H, ta-C and a-C: Me and many others. Such coatings are sputtered in HiPIMS and dc-pulsed magnetron sputtering mode onto a variety of cutting tools , dies and moulds, components and consumer products for highly advantageous tribological

purposes, i.e. extremely low cof ( coefficient of friction)and high wear resistance.
Besides the DLC coatings, in the xPro4C system also high performance metallurgical coatings, such as AlCrSiN, AlTiSiN, AlCrN, AlTiN, CrN, TiC, N, TiN and many others can be deposited with extremely smooth structures. 
 

TECHNICAL HIGHLIGHTS of the xPro4C

HiPIMS Technology**

  • HiPIMS technology
  • Increased deposition rate compared to standard HiPIMS
  • Tailoring of ion energy distribution
  • Reduced magnetron arcing

DC-pulsed technology for carbon

  • High hardness of hydrogen -free DLC –films up to 35-40GPa
  • Excellent control of sp3/sp2 bonding ratio

Short process time

  • Heating capabilities for metal nitrides
  • Efficient cleaning and etching cycle

Improved software design

  • Extreme ease of use
  • Highly reproducible runs
  • High level of flexibility for custom tailored coating solutions 
  • Remote control and diagnostics

Improved thermal management

  • Intensive water cooling
  • Double walled construction

The xPro4C is characterized by:

  • • Robust system designed for the rigorous production environment using sophisticated vacuum coating technologies.
  • • Rugged construction marked by an extremely advanced highly refined design.
  • • Extreme reliability based on intelligent straightforward design and construction.
  • • The broadest spectrum of coatings and coating technology available in a single system at the lowest possible cost.
  • • Fully automatic, computer controlled, closed loop process control providing process repeatability, reliability and a userfriendly environment.
  • • The coating industry's broadest capabilities in the smallest footprint.

** HiPIMS High Power Impulse Magnetron Sputtering

 

DLC coating properties

Coating materialTa-Ca-C:HM-DLC
Thickness (μm)- 1.5- 10- 2.5
Hardness (GPa)35-4015-2030
AdhesionHF1HF1HF1
CoF0.1-0.150.05-0.100.08-0.12
Max service temperature (℃)500350400
ColorBlackBlackBlack

 

Coating applications

  • • Machining aluminum alloys and materials such as plastics where moderate cutting edge temperature (<300ºC)are generated
  • • Engine components: valve trains, piston pins, piston rings, crankshafts, etc., engine fuel injection systems, high-temperature and low-friction components for plastic injection molding etc.
  • • Graphite, composite materials with glass or carbon fibre, glass reinforced PCB materials, high Si content aluminum alloys, PEEK
  • • Optimum finishing with smoother coatings also for machining copper, bronze, silver, gold, platinum and organic materials (Wood, paper)
  • • Metal-containing DLC coatings improve the toughness of coating materials and reduce internal stress of the coating, highly suitable for high-load applications. Also enhance tribochemical lubrication conditions: reducing the running-in time of automotive components or improving the biocompatibility of medical implants. 

 

xPro4C coating system dimensions, process parameters, and production capacity

System Data

  • Size of vacuum chamber: 680×650×1150 mm
  • Plasma volume: Ø 350×700 mm
  • No.and size of rotary platform: 1 pc
  • (substrate carrier)L×W×H: 480×430×1015 mm
  • Pumping: 2 pcs double stage rotary vane pumps   2 pcs turbomolecular pumps
  • Sources: 4 pcs large area magnetron sputtering sources 
  • Power supply: 3 pcs dc-pulsed power supplies   1pc HiPIMS power supply   1pc HiPIMS bias power supply
  • Heater: 2 pcs, rated @5 kW each
  • Overall size L×W×H: 4.000 x 1.300 x 2.250 mm
  • Power: 75 kW, 400 V, 3 ph + N, 50/60 Hz
  •  

Vendor Contact Information

PVT Plasma und Vakuum Technik GmbH, Germany

Address: Rudolf-Diesel-Straße 7, Bensheim, Germany 
Postal code: 64625 
Phone: +49 6251 856560 
Fax: +49 6251 8565656 
Email: info@PVTvacuum.de 
Official website: www.PVTvacuum.de 

PwC Germany’s China Office

Add:RM.A1306,Hui Bin Offices, No.8, Beichen St.,Chaoyang District,Beijing 
100101,P.R.C. 
Tel: +86 13910219677 
Fax:+86 10-84979151 
E-mail:pvtbj@pvtvacuum.com 
Web: www.PVTvacuum.com