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xPro6C DLC–Coating System
Diamond-like-coatings by
HiPIMS and DC-pulsed
magnetron sputtering technology
Product Overview
The xPro6C is the advanced industrial medium size DLC (diamond-like-carbon)coating system, which includes the HiPIM stechnology . Meanwhile, PECVDprocesscanalso beadopted. It is specifically designed for the deposition of high performance DLC coatings, such as a-C, a-C: H, ta-C and a-C: Me and man y others. Such coatings are sputtered in HiPIMS and dc-pulsed magnetron sputtering mode onto a variety of cutting tools , dies and moulds,components and consumer products for highly advantageous tribological
purposes, i.e. extremely low cof ( coefficient of friction)and high wear resistance.
Besides the DLC coatings, in the xPro6C system also high performance metallurgical coatings, such as AlCrSiN, AlTiSiN, AlCrN, AlTiN, CrN, TiC, N, TiN and many others can be deposited with extremely smooth structures.
TECHNICAL HIGHLIGHTS of the xPro6C
HiPIMS Technology**
- HiPIMS technology
- Increased deposition rate compared to standard HiPIMS
- Tailoring of ion energy distribution
- Reduced magnetron arcing
DC-pulsed technology for carbon
- iHigh hardness of hydrogen -free DLC –films up to 35-40GPa
- Excellent control of sp3/sp2 bonding ratio
Short process time
- Heating capabilities for metal nitrides
- Efficient cleaning and etching cycle
Improved software design
- Extreme ease of use.
- Highly reproducible runs.
- High level of flexibility for custom tailored coating solutions
- Remote control and diagnostics
Improved thermal management
- Intensive water cooling
- Double walled construction
The xPro6C is characterized by:
- • Robust system designed for the rigorous production environment using sophisticated vacuum coating technologies.
- • Rugged construction marked by an extremely advanced highly refined design.
- • Extreme reliability based on intelligent straightforward design and construction.
- • The broadest spectrum of coatings and coating technology available in a single system at the lowest possible cost.
- • Fully automatic, computer controlled, closed loop process control providing process repeatability, reliability and a userfriendly environment.
- • The coating industry's broadest capabilities in the smallest footprint
** HiPIMS High Power Impulse Magnetron Sputtering
DLC coating properties
| Coating material | Ta-C | a-C:H | M-DLC |
|---|---|---|---|
| Thickness (μm) | 1.5 | 10 | 2.5 |
| Hardness (GPa) | 35-40 | 15-20 | 30 |
| Adhesion | HF1 | HF1 | HF1 |
| CoF | 0.1-0.15 | 0.05-0.10 | 0.08-0.12 |
| Max service temperature (℃) | 500 | 350 | 400 |
| Color | Black | Black | Black |
Coating applications
• Machining aluminum alloys and materials such as plastics where moderate cutting edge temperature (<300ºC)are generated.
• Engine components: valve trains, piston pins, piston rings, crankshafts, etc., engine fuel injection systems, high-temperature and low-friction components for plastic injection molding etc.
• Graphite, composite materials with glass or carbon fibre, glass reinforced PCB materials, high Si content aluminum alloys, PEEK
• Optimum finishing with smoother coatings also for machining copper, bronze, silver,gold, platinum and organic materials(Wood, paper)
• Metal-containing DLC coatings improve the toughness of coating materials and reduce internal stress of the coating, highly suitable for high-load applications. Also enhance tribochemical lubrication conditions: reducing the running-in time of automotive components or improving the biocompatibility of medical implants.
xPro6C Coating System: Dimensions, Process Parameters, and Production Capacity
System Data
- Size of vacuum chamber: Ø 900 × 1300 mm
- Plasma volume: Ø 710 × 900 mm
- No.and size of rotary platform: 1 pc
- Pumping: 1 sets (including rotary vane pumps& turbomolecular pumps, etc. )
- Sources: 6 pcs large area magnetron sputtering sources
- Power supplies: 2 pc HiPIMS power supply 1 pc HiPIMS bias power supply 4 pcs dc-pulsed power supplies
- Overall size L×W×H: 4.000 x 1.300 x 2.250 mm
- Equipment footprint dimensions: approx. 7.3m (L) × 6.0m (W)
- Power: 100 kW, 400 V, 3 ph + N, 50/60 Hz
System capacity:
- Coating volume: Ø 710 x h 900 mm
Vendor Contact Information
PVT Plasma und Vakuum Technik GmbH, Germany
PwC Germany’s China Office
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PVT Coating (Harbin) Co., Ltd. (abbreviated as PVT Harbin) is the first coating processing center established in China by the German company PVT- Worldwide.
