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xPro-M3 Vacuum Hard Coating System

Product Overview
The xPro-M3 is the most advanced industrial medium size vacuum coating system, which includes the PDA*-technology. It is specifically designed for the deposition of high performance metallurgical coatings,
such as AlCrSiN, AlTiSiN, AlCrN, AlTiN, CrN, TiC, N, TiN and many others. Such coatings are evaporated by arc onto a variety of cutting tools, dies and moulds, components and consumer products for wear, erosion andcorrosion protection as well as tribological purposes.
The xPro-M3 is also in a“pulsed” high power version as xPro-M3H available (HiParc**), where the technology and power supply package enables faster depositon rates, shorter cycle times and significantly improved target utilisation.
The xPro-M3 is characterized by:
- • Robust system designed for the rigorous production, environment using sophisticated vacuum coating technologies.
- • Rugged construction marked by an extremely advanced highly refined design.
- • Extreme reliability based on intelligent straightforward design and construction.
- • The broadest spectrum of coatings andcoating technology available in a single system at the lowest possible cost.
- • Fully automatic, computer controlled, closed loop process control providing process repeatability, reliability and a user-friendly environment.
- • The coating industry's broadest capabilities in the smallest footprint
TECHNICAL HIGHLIGHTS of the xPro-M3
HiParc+PDA III*–Technology
- for the deposition of smooth.
- HiParc+PDA III* "Plasma – Diffused –Arc"
- more compact coatings.
Magnetic arc confinement MACIII*
- Significantly improved target utilization.
- Drastically reduced micro-particle formation.
Short process time
- Increased heating capabilities.
- Efficient cleaning and etching cycle.
Improved coating properties
- Advanced interface formation.
- Extremely clean process environment.
Improved part handling and fixturing.
- Safest most manoeuvrable transport carts.
- Easy to load and use carts with high load capabilities.
Improved software design.
- Extreme ease of use.
- Highly reproducible runs.
- High level of flexibility for custom tailored coating solutions.
- Remote control and diagnostics.
Improved thermal management.
- Improved intensive cooling.
- Double walled construction.
Most reliable components
- Brand name components
- Clever integration
xPro-M3 Coating System: Dimensions, Process Parameters, and Production Capacity
System Data
- Size of vacuum chamber: 860×860×1150 mm
- Coating volume: Ø 520×h 720 mm
- No.and size of rotary platform: 2 pcs
- (substrate carrier)L×W×H: 660×650×1015 mm
- Pumping: 2 pcs double stage rotary vane pumps 1 roots pump 1 pc turbomolecular pump
- Sources: 3 pcs large area arc evaporators
- Power supplies: 3 pcs arc power supplies @400A pulsed 1 pc 15 kW dc power supply
- Heater: 3 pcs, rated @12 kW each
- Overall size L×W×H: 3.650×1.615×2.220 mm
- Power: 100 kW, 400 V, 3 ph + N, 50/60 Hz
System capacity
- Plasma volume: Ø 520×720 mm
- End mills Ø4×50 mm: 2.100 pcs
- End mills Ø12×75 mm: 720 pcs
- Inserts ½”×½”×4 mm: 4.400 pcs
- Hobs Ø80×80 mm: 128 pcs
- Hobs Ø100×100 mm: 78 pcs
* PDA = Plasma – Diffused – Arc Plasma Diffusion Arc
**HiParc =High power Pulsed Arc